DocumentCode
1284019
Title
Solution-Processed Zinc Oxide Thin-Film Transistors With a Low-Temperature Polymer Passivation Layer
Author
Xu, Xiaoli ; Feng, Linrun ; He, Shasha ; Jin, Yizheng ; Guo, Xiaojun
Author_Institution
Dept. of Electron. Eng., Shanghai Jiao Tong Univ., Shanghai, China
Volume
33
Issue
10
fYear
2012
Firstpage
1420
Lastpage
1422
Abstract
Bottom-gate top-contact zinc oxide (ZnO) thin-film transistors were fabricated with a low annealing temperature (150 °C) using ammine-hydroxo zinc precursors. The unpassivated devices present profound hysteresis in the measured current-voltage characteristics and a negative output conductance, which were attributed to the interaction of back surface with the oxygen molecules in the ambient atmosphere. To suppress the ambient influence without impacting the device´s intrinsic performance, a simple low-temperature (75 °C ) solution-based passivation approach with polydimethylsiloxane was developed. The passivated devices present typical field-effect transistor behaviors of greatly improved device performance.
Keywords
II-VI semiconductors; annealing; field effect transistors; polymer films; thin film transistors; wide band gap semiconductors; zinc compounds; ZnO; ambient atmosphere; ammine-hydroxo zinc precursors; annealing temperature; back surface interaction; bottom-gate top-contact zinc oxide thin-film transistors; current-voltage characteristics; field-effect transistor behaviors; low-temperature polymer passivation layer; low-temperature solution-based passivation approach; negative output conductance; oxygen molecules; polydimethylsiloxane; profound hysteresis; solution-based passivation approach; solution-processed zinc oxide thin-film transistors; temperature 150 degC; temperature 75 degC; unpassivated devices; Annealing; Hysteresis; Logic gates; Passivation; Semiconductor device measurement; Transistors; Zinc oxide; Passivation; solution process; thin-film transistor (TFT); zinc oxide (ZnO);
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/LED.2012.2210853
Filename
6301678
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