• DocumentCode
    1284019
  • Title

    Solution-Processed Zinc Oxide Thin-Film Transistors With a Low-Temperature Polymer Passivation Layer

  • Author

    Xu, Xiaoli ; Feng, Linrun ; He, Shasha ; Jin, Yizheng ; Guo, Xiaojun

  • Author_Institution
    Dept. of Electron. Eng., Shanghai Jiao Tong Univ., Shanghai, China
  • Volume
    33
  • Issue
    10
  • fYear
    2012
  • Firstpage
    1420
  • Lastpage
    1422
  • Abstract
    Bottom-gate top-contact zinc oxide (ZnO) thin-film transistors were fabricated with a low annealing temperature (150 °C) using ammine-hydroxo zinc precursors. The unpassivated devices present profound hysteresis in the measured current-voltage characteristics and a negative output conductance, which were attributed to the interaction of back surface with the oxygen molecules in the ambient atmosphere. To suppress the ambient influence without impacting the device´s intrinsic performance, a simple low-temperature (75 °C ) solution-based passivation approach with polydimethylsiloxane was developed. The passivated devices present typical field-effect transistor behaviors of greatly improved device performance.
  • Keywords
    II-VI semiconductors; annealing; field effect transistors; polymer films; thin film transistors; wide band gap semiconductors; zinc compounds; ZnO; ambient atmosphere; ammine-hydroxo zinc precursors; annealing temperature; back surface interaction; bottom-gate top-contact zinc oxide thin-film transistors; current-voltage characteristics; field-effect transistor behaviors; low-temperature polymer passivation layer; low-temperature solution-based passivation approach; negative output conductance; oxygen molecules; polydimethylsiloxane; profound hysteresis; solution-based passivation approach; solution-processed zinc oxide thin-film transistors; temperature 150 degC; temperature 75 degC; unpassivated devices; Annealing; Hysteresis; Logic gates; Passivation; Semiconductor device measurement; Transistors; Zinc oxide; Passivation; solution process; thin-film transistor (TFT); zinc oxide (ZnO);
  • fLanguage
    English
  • Journal_Title
    Electron Device Letters, IEEE
  • Publisher
    ieee
  • ISSN
    0741-3106
  • Type

    jour

  • DOI
    10.1109/LED.2012.2210853
  • Filename
    6301678