A 94-GHz aperture-coupled micromachined microstrip antenna

Author

Gauthier, Gildas P. ; Raskin, Jean-Pierre ; Katehi, Linda P B ; Rebeiz, Gabriel M.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA

Volume

47

Issue

12

fYear

1999

fDate

12/1/1999 12:00:00 AM

Firstpage

1761

Lastpage

1766

Abstract

This paper presents an aperture-coupled micromachined microstrip antenna operating at 94 GHz. The design consists of two stacked silicon substrates: (1) the top substrate, which carries the microstrip antenna, is micromachined to improve the radiation performance of the antenna and (2) the bottom substrate, which carries the microstrip feed line and the coupling slot. The measured return loss is -18 dB at 94 GHz for a 10-dB bandwidth of 10%. A maximum efficiency of 58±5% has been measured and the radiation patterns show a measured front-to-back ratio of -10 dB at 94 GHz. The measured mutual coupling is below -20 dB in both E- and H-plane directions due to the integration of small 50-μm silicon beams between the antennas. The micromachined microstrip antenna is an efficient solution to the vertical integration of antenna arrays at millimeter-wave frequencies

Keywords

antenna accessories; antenna radiation patterns; electromagnetic coupling; micromechanical devices; microstrip antenna arrays; millimetre wave antenna arrays; 18 dB; 58 percent; 94 GHz; 94-GHz aperture-coupled micromachined microstrip antenna; E-plane direction; H-plane direction; antenna arrays; coupling slot; front-to-back ratio; maximum efficiency; microstrip feed line; millimeter-wave frequencies; mutual coupling; radiation patterns; radiation performance; return loss; stacked silicon substrates; Antenna feeds; Antenna measurements; Antenna radiation patterns; Aperture antennas; Bandwidth; Loss measurement; Microstrip antenna arrays; Microstrip antennas; Silicon; Slot antennas;

fLanguage

English

Journal_Title

Antennas and Propagation, IEEE Transactions on

Publisher

ieee

ISSN

0018-926X

Type

jour

DOI

10.1109/8.817650

Filename

817650