Overmoded shear horizontal wave MEMS resonators using X-cut lithium niobate thin film

This work reports on the design, analysis and development of a lithium niobate (LN) based overmoded shear horizontal 0 (SH0) resonator. The device is extensively modeled using finite element method and a variety of resonance modes are identified in the simulated device response. The designed devices were subsequently fabricated by leveraging the ion-slicing enabled film transfer as well as several advanced micromachining techniques. The fabricated resonator has demonstrated a large electromechanical coupling of 14.5%, a quality factor of 510, and a spurious mode free response. The measured response shows good agreement with simulated results. The demonstrated SH0 resonator offers significant advantages in frequency scalability, impedance matching to supporting electronics, and absence of spurious modes.