DocumentCode
1292006
Title
Limits to the size of semiconductor devices
Author
Wilson, B.L.H.
Author_Institution
Plessey Research (Caswell) Limited, Allen Clark Research Centre, Towcester, UK
Volume
26
Issue
9
fYear
1980
fDate
9/1/1980 12:00:00 AM
Firstpage
704
Lastpage
708
Abstract
Component density on integrated circuits continues to increase at a high rate. What are the limitations to miniaturisation of components, and by what means are these limits pushed back?
fLanguage
English
Journal_Title
Electronics and Power
Publisher
iet
ISSN
0013-5127
Type
jour
DOI
10.1049/ep.1980.0372
Filename
5197880
Link To Document