Ultrasonic beam formation by pMUTs array using epitaxial PZT thin films on γ-Al2O3/Si substrates

Author

Akai, Daisuke ; Ishida, Makoto ; Nishimura, M. ; Okada, Norio

Author_Institution

Electron.-Inspired Interdiscipl. Res. Inst. (EIIRIS), Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2014

fDate

3-6 Sept. 2014

Firstpage

2576

Lastpage

2579

Abstract

We have proposed γ-Al₂O₃ thin films as an epitaxial buffer layer on Si substrates for obtaining epitaxial Pb(Zr,Ti)O₃ (PZT) thin films and reported a 2-D ultrasonic image sensor and measurement and analysis of ultrasonic transmission using piezoelectric micromachined ultrasonic transducers (pMUTs) on γ-Al₂O₃/Si substrates. -6 dB beamwidth and sound pressure at 5 mm from surface of the 4 channel pMUT array were exbited 10 times larger than signle pMUT. These experimental results good agree with analysis results. It will be applied to design miniature 2-D pMUTs array ultrasonic probe.

Keywords

epitaxial layers; lead compounds; ultrasonic imaging; ultrasonic transducer arrays; 2D ultrasonic image sensor; Al₂O₃-Si; PZT; epitaxial buffer layer; epitaxial thin films; pMUTs array; piezoelectric micromachined ultrasonic transducers; sound pressure; ultrasonic beam formation; ultrasonic transmission; Acoustic beams; Acoustics; Arrays; Finite element analysis; Silicon; Substrates; Transducers; PZT; annular array; pMUT;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2014 IEEE International

Conference_Location

Chicago, IL

Type

conf

DOI

10.1109/ULTSYM.2014.0643

Filename

6931881