Design, fabrication, and performance of infrared and visible vertical-cavity surface-emitting lasers

Author

Chow, Weng W. ; Choquette, Kent D. ; Crawford, Mary H. ; Lear, Kevin L. ; Hadley, G Ronald

Author_Institution

Sandia Nat. Labs., Albuquerque, NM, USA

Volume

33

Issue

10

fYear

1997

fDate

10/1/1997 12:00:00 AM

Firstpage

1810

Lastpage

1824

Abstract

This paper discusses the issues involving the design and fabrication of vertical-cavity surface-emitting lasers (VCSELs). A review of the basic experimental structures is given, with emphasis on recent developments in distributed Bragg reflectors, gain media, as well as current and optical confinement techniques. The paper describes present VCSEL performance, in particular, those involving selective oxidation and visible wavelength operation

Keywords

distributed Bragg reflector lasers; ion implantation; optical fabrication; oxidation; semiconductor growth; semiconductor lasers; surface emitting lasers; VCSEL; current confinement techniques; design; distributed Bragg reflectors; experimental structures; fabrication; gain media; infrared vertical-cavity surface-emitting lasers; ion implantation; optical confinement techniques; selective oxidation; visible vertical-cavity surface-emitting lasers; visible wavelength operation; Laser beams; Laser modes; Mirrors; Optical design; Optical device fabrication; Optical resonators; Optical surface waves; Semiconductor lasers; Surface emitting lasers; Vertical cavity surface emitting lasers;

fLanguage

English

Journal_Title

Quantum Electronics, IEEE Journal of

Publisher

ieee

ISSN

0018-9197

Type

jour

DOI

10.1109/3.631287

Filename

631287