DocumentCode
129804
Title
Investigation of platinum based periodic gratings on langasite
Author
Bruckner, G. ; Nicolay, P. ; Bardong, J. ; Shaposhnikov, K.
Author_Institution
Carinthian Tech Res. AG, Villach, Austria
fYear
2014
fDate
3-6 Sept. 2014
Firstpage
2043
Lastpage
2046
Abstract
While the understanding of the properties of gratings is essential for any SAW design, high temperature stable electrodes, which are generally made of heavy materials, are not easily accessible by simulation. We have therefore studied this type of electrodes both experimentally and by simulation. Motivated by the demands made by SAW gas sensors operating at high temperatures we opted for a combination of langasite as substrate material and platinum as metallization of the electrodes. Delay line designs with free propagation paths as well as open and shorted gratings were used to assess the velocity inside the grating and the reflection coefficient. The operation frequency and the height of the electrodes were varied in several production runs to vary the ratio of metallization/wavelength. The experimental results are compared with calculated values using different simulation methods.
Keywords
electrodes; gallium compounds; gas sensors; lanthanum compounds; metallisation; platinum; surface acoustic wave sensors; La3Ga5SiO14; Pt; SAW gas sensors; delay line designs; free propagation paths; high temperature stable electrodes; langasite; metallization; platinum-based periodic gratings; reflection coefficient; Delay lines; Electrodes; Finite element analysis; Gratings; Metallization; Platinum; Surface acoustic waves; FEM/SDA; Full-FEM; LGS; Pt electrodes; grating; high temperature; langasite; simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2014 IEEE International
Conference_Location
Chicago, IL
Type
conf
DOI
10.1109/ULTSYM.2014.0509
Filename
6932262
Link To Document