DocumentCode :
1312173
Title :
Active MEMS Valves for Flow Control in a High-Pressure Micro-Gas-Analyzer
Author :
Galambos, Peter ; Lantz, J. ; Baker, Michael S. ; McClain, J. ; Bogart, G.R. ; Simonson, R.J.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Volume :
20
Issue :
5
fYear :
2011
Firstpage :
1150
Lastpage :
1162
Abstract :
We present active electrostatic MEMS gas valves for Micro-Gas-Analyzer (MGA) flow control. These unique valves enable extremely low dead volume, highly integrated flow control chips for the MGA application, and potentially others (e.g., propulsion, pneumatic, and thermodynamic microsystems). We have demonstrated low leak rates ( <; 0.025 sccm, <; 0.0025 sccm on a similar passive valve design), high operating pressures 6.9×105 N/m2 (100 psig), a high-pressure record for valves of this size and type, and high flow rates (>; 25 sccm) using control voltages on the order of 100 V. The valve designs presented eliminate charge build-up issues associated with insulating materials and are closely tied to a base-lined microfabrication process (SUMMiT), allowing mass production. Using this process, which incorporates only CMOS compatible materials, eliminates outgassing and absorption problems inherent to microvalve designs that incorporate elastomers or organic bonding layers, and reduces contamination when the valve is part of the chemical analysis flowpath. The results obtained indicate that even higher performance level valves (>; 1.4 × 106 N/m2 or 200 psig operating pressure, at similar control voltage, flow rates, and leak rates) are possible.
Keywords :
CMOS integrated circuits; chromatography; flow control; lab-on-a-chip; microfabrication; microfluidics; microvalves; CMOS compatible material; SUMMiT; active MEMS valves; chemical analysis flowpath; electrostatic MEMS gas valves; high pressure micro gas analyzer; insulating materials; integrated flow control chips; microfabrication process; Actuators; Electrodes; Electrostatics; Force; Glass; Springs; Valves; Chemical analysis; electrostatic devices; fluid flow control; valves;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2011.2163299
Filename :
6007033
Link To Document :
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