Title :
A coaxial 0.5-18 GHz near electric field measurement system for planar microwave circuits using integrated probes
Author :
Budka, Thomas P. ; Waclawik, Scott D. ; Rebeiz, Gabriel M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
fDate :
12/1/1996 12:00:00 AM
Abstract :
This paper reports on the basic theory of operation and experimental results obtained from an electric field imaging system for planar microwave circuits that employs the method of modulated scattering with monolithically integrated probes. The low-cost system is capable of mapping the normal and tangential electric field intensities and electrical phase delays above reciprocal microwave circuits in the frequency range of 0.5-18 GHz with a spatial electric field resolution of better than 100 μm. Monolithic probes incorporating silicon Schottky diodes integrated with electrically small dipole and monopole antenna scatterers on a 40-μm-thick high-resistivity silicon substrate are used. Electric field intensity and electrical phase delay images are presented for a 55-Ω coplanar waveguide line (CPW), a three-turn microstrip meander line at 8.8, 11.7, and 13.4 GHz, a microstrip coupled-line directional coupler at 10 GHz, and a microstrip patch antenna at 12.85 GHz. The results demonstrate that the modulated scattering technique is a valuable low-cost tool for microwave circuit diagnostics
Keywords :
MMIC; coplanar waveguides; electric field measurement; integrated circuit measurement; integrated circuit testing; microstrip antennas; microstrip directional couplers; microstrip lines; microwave measurement; probes; 0.5 to 18 GHz; 55 ohm; MMICs; Schottky diode probes; antenna scatterers; coplanar waveguide line; electric field imaging system; electric field intensities; electrical phase delays; integrated probes; microstrip coupled-line directional coupler; microstrip meander line; microstrip patch antenna; microwave circuit diagnostics; modulated scattering; near electric field measurement; planar microwave circuits; Coaxial components; Coplanar waveguides; Electric variables measurement; Integrated circuit measurements; Microstrip antennas; Microwave circuits; Microwave theory and techniques; Probes; Scattering; Silicon;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on