Micromachined AlGaAs/GaAs vertical cavity filter with adjustable temperature dependence and wavelength trimming ability

Author

Amano, T. ; Koyama, F. ; Furukawa, N. ; Nishiyama, N. ; Matsutani, A. ; Iga, K.

Author_Institution

Precision & Intelligence Lab., Tokyo Inst. of Technol., Yokohama, Japan

Volume

36

Issue

1

fYear

2000

fDate

1/6/2000 12:00:00 AM

Firstpage

74

Lastpage

76

Abstract

The authors present a novel micromachined vertical cavity filter which has an AlGaAs/GaAs distributed Bragg reflector (DBR), that can be mechanically tuned by differential thermal expansion. The strain-induced displacement of one of the mirrors potentially enables wavelength tuning and trimming to be carried out with an adjustable temperature dependence. A negative temperature coefficient has been achieved in a micromachined semiconductor filter for the first time, demonstrating the possibility of temperature insensitive operation. Also, wavelength trimming of >20 nm was demonstrated after completion of the device fabrication

Keywords

III-V semiconductors; aluminium compounds; cavity resonator filters; gallium arsenide; laser accessories; micromachining; mirrors; optical fabrication; optical filters; optical tuning; semiconductor heterojunctions; thermal expansion; AlGaAs-GaAs; AlGaAs/GaAs vertical cavity filter; adjustable temperature dependence; device fabrication; differential thermal expansion; distributed Bragg reflector; micromachined filter; micromachined semiconductor filter; mirrors; negative temperature coefficient; strain-induced displacement; temperature insensitive operation; wavelength trimming; wavelength trimming ability; wavelength tuning;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el:20000123

Filename

830530