Title :
The scanning electron microscope
Author_Institution :
University, of California, Berkeley
Abstract :
The scanning electron microscope combines the techniques of the cathode-ray tube and the conventional electron microscope¿both considered indispensable to modern technology. The SEM, which presents a picture having a distinct three-dimensional appearance, is finding application in the examination of wood fibers in connection with paper manufacture, of surfaces undergoing ionic bombardment, and of corrosion. At the present time, one of the most pressing problems is to reduce its total cost.
Keywords :
Anodes; Blanking; Cathode ray tubes; Current density; Electron beams; Electron sources; Instruments; Lenses; Scanning electron microscopy; Surface topography;
Journal_Title :
Spectrum, IEEE
DOI :
10.1109/MSPEC.1967.5217128
