• DocumentCode
    1328982
  • Title

    Statistical Weight Kinetics Modeling and Estimation for Silica Nanowire Growth Catalyzed by Pd Thin Film

  • Author

    Huang, Qiang ; Wang, Li ; Dasgupta, Tirthankar ; Zhu, Li ; Sekhar, Praveen K. ; Bhansali, Shekhar ; An, Yu

  • Author_Institution
    Daniel J. Epstein Dept. of Ind. & Syst. Eng., Univ. of Southern California, Los Angeles, CA, USA
  • Volume
    8
  • Issue
    2
  • fYear
    2011
  • fDate
    4/1/2011 12:00:00 AM
  • Firstpage
    303
  • Lastpage
    310
  • Abstract
    This work intends to understand and model the kinetic aspect or the change of substrate weight over time in the selective growth of silica nanowires (NWs) catalyzed through Pd thin film. Various adsorption-induced, diffusion-induced, or unified vapor-liquid-solid (VLS) growth models have been developed to describe the NW length varying with time. Since NW length has been difficult to be measured, substrate weight change is therefore used as an alternative in this study to investigate growth kinetics of NWs. We investigate six different weight kinetics models in predicting weight changes during growth. Model estimation and comparison are conducted using both maximum-likelihood estimation (MLE) and Bayesian approaches. Owing to the embedded kinetics information in the nonlinear growth models, the Bayesian hierarchical model is shown to be more desirable when process data is limited.
  • Keywords
    adsorption; belief networks; catalysis; diffusion; magnetic thin films; nanowires; palladium; silicon compounds; Bayesian approaches; Bayesian hierarchical model; Pd; SiO2; adsorption-induced model; catalysis; diffusion-induced model; maximum-likelihood estimation; nonlinear growth models; silica nanowire growth; statistical weight kinetics estimation; statistical weight kinetics modeling; substrate weight; thin film; unified vapor-liquid-solid growth model; Computational modeling; Kinetic theory; Maximum likelihood estimation; Silicon; Silicon compounds; Substrates; Model selection; nanomanufacturing; nanostructure growth; process modeling;
  • fLanguage
    English
  • Journal_Title
    Automation Science and Engineering, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    1545-5955
  • Type

    jour

  • DOI
    10.1109/TASE.2010.2070493
  • Filename
    5580014