DocumentCode :
1329426
Title :
Modular Eddy Current Micro Sensor
Author :
Griesbach, T. ; Wurz, M.C. ; Rissing, Lutz
Author_Institution :
Center for Production Technol., Leibniz Univ. Hannover, Garbsen, Germany
Volume :
47
Issue :
10
fYear :
2011
Firstpage :
3760
Lastpage :
3763
Abstract :
In order to provide a contactless measurement technique to examine products during the fabrication process, a modular design of an eddy current micro sensor was developed and fabricated in thin-film technology. The sensor consists of two parts, a single-turn excitation coil and an anisotropic magneto-resistance (AMR) sensor. The AMR sensor detects the change of the magnetic field induced in a sample by the excitation coil. Initial investigations were conducted to prove the capability of the completed eddy current micro sensor. A defect was created on the surface of a Cu probe. The electrical output signal of the AMR sensor was subsequently compared to optical measurements of the surface profile of the crack. There is a high correlation between the optical measurements and to those of the eddy current micro sensor.
Keywords :
coils; eddy currents; electric sensing devices; enhanced magnetoresistance; magnetic fields; microfabrication; microsensors; thin film sensors; AMR sensor; Cu; anisotropic magnetoresistance sensor; contactless measurement technique; electrical output signal; fabrication process; modular eddy current microsensor; single-turn excitation coil; surface profile optical measurement; thin-film technology; Coils; Copper; Current measurement; Eddy currents; Probes; Resistance; Surface cracks; Eddy current sensor; magnetic micro sensors; micro sensor fabrication; modular sensor concept;
fLanguage :
English
Journal_Title :
Magnetics, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9464
Type :
jour
DOI :
10.1109/TMAG.2011.2155629
Filename :
6027638
Link To Document :
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