Title :
Interaction of Free and Bound Microplasmas
Author :
Sung, S.H. ; Kim, Y.H. ; Park, S.-J. ; Eden, J.G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Illinois, Urbana, IL, USA
Abstract :
Low-temperature microplasmas confined to quasi-ellipsoidal cavities have been observed to interact with free columnar filaments produced in a parallel plate dielectric barrier discharge structure. Small arrays of microcavities, fabricated into the interior surfaces of two glass plates separated by 80 μm, support stable glows having major and minor axes of 700±50 and 540±20 μm, respectively, for a Ne gas pressure of 300-760 Torr. Surrounding the bound (microcavity) plasmas are diffuse columnar microplasmas having a mean diameter and separation (pitch) of 136±10 and 485±60 μm, respectively. Optical images of free microplasmas interacting with only two ~ 700-μm-diameter cavities show microplasmas trapped both at the perimeters of the microcavities as well as along a line bisecting the microcavities.
Keywords :
discharges (electric); microcavities; microfluidics; plasma diagnostics; plasma-beam interactions; bound microplasma; columnar filaments; diffuse columnar microplasmas; distance 80 mum; free microplasma; glass plates; microcavities; microcavity; optical emission; optical images; parallel plate dielectric barrier discharge structure; pressure 300 torr to 760 torr; quasi-ellipsoidal cavities; Cavity resonators; Dielectrics; Discharges; Glass; Microcavities; Optical imaging; Plasmas; Microcavities; microplasmas; optical emission;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2011.2165857
