Title :
A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems
Author :
Ferreira, Antoine ; Aphale, Sumeet S.
Author_Institution :
Inst. PRISME, ENSI Bourges, Bourges, France
fDate :
5/1/2011 12:00:00 AM
Abstract :
In the current times, microelectromechanical systems and nanoelectromechanical systems form a major interdisciplinary area of research involving science, engineering, and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This paper presents a review of the emerging advances in the modeling and control of these micro- and nanoscale devices and converges on the exciting research in on-chip control , with a mechatronics and controls perspective and concludes by projecting future trends.
Keywords :
micromechanical devices; nanoelectromechanical devices; control technique; mechatronics; microelectromechanical system; nanoelectromechanical system; nanoscale device; on-chip control; Computational modeling; Integrated circuit modeling; Mathematical model; Micromechanical devices; Nanoelectromechanical systems; Object oriented modeling; Solid modeling; Control; lab-on-a-chip; microelectromechanical systems (MEMS); modeling; nanoelectromechanical systems (NEMS);
Journal_Title :
Systems, Man, and Cybernetics, Part C: Applications and Reviews, IEEE Transactions on
DOI :
10.1109/TSMCC.2010.2072779