DocumentCode :
1336916
Title :
A Survey of Modeling and Control Techniques for Micro- and Nanoelectromechanical Systems
Author :
Ferreira, Antoine ; Aphale, Sumeet S.
Author_Institution :
Inst. PRISME, ENSI Bourges, Bourges, France
Volume :
41
Issue :
3
fYear :
2011
fDate :
5/1/2011 12:00:00 AM
Firstpage :
350
Lastpage :
364
Abstract :
In the current times, microelectromechanical systems and nanoelectromechanical systems form a major interdisciplinary area of research involving science, engineering, and technology. A lot of work has been reported in the area of modeling and control of these devices, with the aim of better understanding their behavior and improving their performance. This paper presents a review of the emerging advances in the modeling and control of these micro- and nanoscale devices and converges on the exciting research in on-chip control , with a mechatronics and controls perspective and concludes by projecting future trends.
Keywords :
micromechanical devices; nanoelectromechanical devices; control technique; mechatronics; microelectromechanical system; nanoelectromechanical system; nanoscale device; on-chip control; Computational modeling; Integrated circuit modeling; Mathematical model; Micromechanical devices; Nanoelectromechanical systems; Object oriented modeling; Solid modeling; Control; lab-on-a-chip; microelectromechanical systems (MEMS); modeling; nanoelectromechanical systems (NEMS);
fLanguage :
English
Journal_Title :
Systems, Man, and Cybernetics, Part C: Applications and Reviews, IEEE Transactions on
Publisher :
ieee
ISSN :
1094-6977
Type :
jour
DOI :
10.1109/TSMCC.2010.2072779
Filename :
5586662
Link To Document :
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