DocumentCode :
1340326
Title :
Design automation in a subwavelength world
Volume :
17
Issue :
2
fYear :
2000
Firstpage :
120
Lastpage :
126
Keywords :
Circuit synthesis; Design automation; Design methodology; Electronic design automation and methodology; Inspection; Lithography; Manufacturing; Optical design; Process design; Silicon;
fLanguage :
English
Journal_Title :
Design & Test of Computers, IEEE
Publisher :
ieee
ISSN :
0740-7475
Type :
jour
DOI :
10.1109/MDT.2000.844341
Filename :
844341
Link To Document :
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