Title :
Experimental Demonstration of Horizontal Nanoplasmonic Slot Waveguide-Ring Resonators With Submicrometer Radius
Author :
Shiyang Zhu ; Lo, G.Q. ; Kwong, D.L.
Author_Institution :
Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore
Abstract :
Ultracompact plasmonic waveguide-ring resonators (WRRs) based on horizontal Cu/SiO2/Si/SiO2/Cu nanoplasmonic slot waveguides are fabricated using standard Si complementary metal-oxide-semiconductor (CMOS) technology for operation at telecommunication wavelengths. Efficient coupling between the ring and bus waveguides is achieved through a small aperture in the metallic sidewalls of the waveguides. A WRR with a radius 0.91 μm (cavity mode volume of ~0.145 μm3 ) is characterized, exhibiting an insertion loss of ~2.4 dB, an extinction ratio of ~28 dB at the 1596-nm resonance (corresponding to the seventh cavity mode), a free-spectral range of ~143 nm, and a quality factor of ~638. The demonstrated WRR can be used as a building block for various functional nanoplasmonic devices to be seamlessly integrated in the existing Si photonic and electronic integrated circuits.
Keywords :
Q-factor; copper; integrated optics; nanophotonics; optical couplers; optical waveguides; plasmonics; silicon compounds; Cu-SiO2-Si-SiO2-Cu; bus waveguides; complementary metal-oxide-semiconductor technology; extinction ratio; free-spectral range; horizontal nanoplasmonic slot waveguide-ring resonators; insertion loss; quality factor; ring waveguides; size 0.91 mum; wavelength 1596 nm; Integrated circuits; Optical waveguide theory; Plasmons; Propagation losses; Photonic integrated circuits; plasmonic waveguide; waveguide-ring resonator (WRR);
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2011.2171934
