Title :
Improved MEMS AE sensors in HARM technology
Author :
Sommer, Rainer ; Freitag, Michael ; Schaufuss, J. ; Sorger, A. ; Mehner, J.
Author_Institution :
Tech. Univ. Chemnitz, Chemnitz, Germany
Abstract :
In this work a MEMS based acoustic emission (AE) sensor is fabricated in a modified high aspect ratio micromachining (HARM) technology. The improved band-pass sensor consisting of four single resonators is developed to detect AE signals in the increased frequency range of 100 kHz-130 kHz. Additionally the sensor´s sensitivity is reduced below the working frequencies to avoid overloads of the signal conditioning circuitry caused by disturbing low frequency vibrations. The sensor will be used for failure detection in hybrid components like wind turbines and to monitor conveyor belts in terms of wear and friction.
Keywords :
acoustic emission; acoustic signal detection; failure analysis; micromachining; micromechanical resonators; microsensors; signal conditioning circuits; vibrations; AE signal detection; HARM technology; MEMS AE sensor fabrication; acoustic emission; band-pass sensor; failure detection; frequency 100 kHz to 130 kHz; high aspect ratio machining; hybrid components; low frequency vibration; resonator; signal conditioning circuitry; Friction; Indexes; Integrated circuits; Mechanical sensors; Monitoring; Resonant frequency; Acoustic emission sensor; MEMS; increased bandwidth; mechanical band-pass;
Conference_Titel :
Multi-Conference on Systems, Signals & Devices (SSD), 2014 11th International
Conference_Location :
Barcelona
DOI :
10.1109/SSD.2014.6808917
