High performance 0.1 μm gate-length p-type SiGe MODFET´s and MOS-MODFET´s

High performance p-type modulation-doped field-effect transistors (MODFET´s) and metal-oxide-semiconductor MODFET (MOS-MODFET) with 0.1 μm gate-length have been fabricated on a high hole mobility SiGe-Si heterojunction grown by ultrahigh vacuum chemical vapor deposition. The MODFET devices exhibited an extrinsic transconductance (g_m) of 142 mS/mm, a unity current gain cut-off frequency (f_T) of 45 GHz and a maximum oscillation frequency (f_MAX) of 81 GHz, 5 nm-thick high quality jet-vapor-deposited (JVD) SiO₂ was utilized as gate dielectric for the MOS-MODFET´s. The devices exhibited a lower gate leakage current (1 nA/μm at V_gs=6 V) and a wider gate operating voltage swing in comparison to the MODFET´s. However, due to the larger gate-to-channel distance and the existence of a parasitic surface channel, MOS-MODFET´s demonstrated a smaller peak g _m of 90 mS/mm, f_T of 38 GHz, and f_max of 64 GHz. The threshold voltage shifted from 0.45 V for MODFET´s to 1.33 V for MOS-MODFET´s. A minimum noise figure (NF_min) of 1.29 dB and an associated power gain (G_a) of 12.8 dB were measured at 2 GHz for MODFET´s, while the MOS-MODFET´s exhibited a NF _min of 0.92 dB and a G_a of 12 dB at 2 GHz. These DC, RF, and high frequency noise characteristics make SiGe/Si MODFET´s and MOS-MODFET´s excellent candidates for wireless communications