• DocumentCode
    1361965
  • Title

    Solid state: Silicon sensors meet integrated circuits: The combination of sensing and circuit technology in monolithic form is making transducers cheaper and more versatile

  • Author

    Barth, P.W.

  • Author_Institution
    Stanford Univ., Stanford, CA, USA
  • Volume
    18
  • Issue
    9
  • fYear
    1981
  • Firstpage
    33
  • Lastpage
    39
  • Abstract
    Describes the combination of sensing and circuit technology in monolithic form is making transducers cheaper and more versatile.
  • Keywords
    monolithic integrated circuits; transducers; Si; circuit technology; integrated circuits; monolithic; sensing; sensors; transducers; Bonding; Glass; Laboratories; Sensors; Silicon; Surface treatment;
  • fLanguage
    English
  • Journal_Title
    Spectrum, IEEE
  • Publisher
    ieee
  • ISSN
    0018-9235
  • Type

    jour

  • DOI
    10.1109/MSPEC.1981.6369810
  • Filename
    6369810
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1361965