DocumentCode
136202
Title
Foreword
Author
Moreno, Edward David
Author_Institution
Federal University of Sergipe, UFS, Brazil
fYear
2014
fDate
1-5 Sept. 2014
Firstpage
1
Lastpage
1
Abstract
The SBMicro symposium is an international forum dedicated to fabrication and modeling of microsystems, integrated circuits and devices, held annually in Brazil. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators and MEMS.
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics Technology and Devices (SBMicro), 2014 29th Symposium on
Conference_Location
Aracaju, Brazil
Type
conf
DOI
10.1109/SBMicro.2014.6940072
Filename
6940072
Link To Document