• DocumentCode
    136202
  • Title

    Foreword

  • Author

    Moreno, Edward David

  • Author_Institution
    Federal University of Sergipe, UFS, Brazil
  • fYear
    2014
  • fDate
    1-5 Sept. 2014
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The SBMicro symposium is an international forum dedicated to fabrication and modeling of microsystems, integrated circuits and devices, held annually in Brazil. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators and MEMS.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microelectronics Technology and Devices (SBMicro), 2014 29th Symposium on
  • Conference_Location
    Aracaju, Brazil
  • Type

    conf

  • DOI
    10.1109/SBMicro.2014.6940072
  • Filename
    6940072