DocumentCode
1363540
Title
Suspended Spiral Inductor and Band-Pass Filter on Thick Anodized Aluminum Oxide
Author
Yook, Jong-Min ; Kim, Kyoung-Min ; Kwon, Young-Se
Author_Institution
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Daejeon, South Korea
Volume
19
Issue
10
fYear
2009
Firstpage
620
Lastpage
622
Abstract
We make suspended inductors and 2.45 GHz BPFs on the selectively anodized aluminum. The thick anodized alumina is used as the supporting dielectric and it is easily removed by using chemical wet-etching. The thickness of anodized alumina is 80 mum and the depth of the total air-cavity is 200 mum. The fabricated inductor over an air cavity has a 25% greater Q factor and 21% higher inductance at 2 GHz compared to an inductor on anodized aluminum. The 2.45 GHz BPF adjusting the suspended inductors has 2.8 dB of insertion loss with a narrow bandwidth.
Keywords
band-pass filters; etching; inductors; Q factor; band-pass filter; chemical wet-etching; frequency 2 GHz; frequency 2.45 GHz; loss 2.8 dB; suspended spiral inductor; thick anodized aluminum oxide; 2.45 GHz band-pass filter (BPF); Air-cavity; anodized aluminum; high Q inductor; suspended inductor;
fLanguage
English
Journal_Title
Microwave and Wireless Components Letters, IEEE
Publisher
ieee
ISSN
1531-1309
Type
jour
DOI
10.1109/LMWC.2009.2029735
Filename
5232829
Link To Document