Membrane-supported coplanar waveguides for MMIC and sensor application

Author

Dehe, A. ; Klingbeil, H. ; Weil, C. ; Hartnagel, H.L.

Author_Institution

Inst. fur Hochfrequenztech., Darmstadt Univ. of Technol., Germany

Volume

8

Issue

5

fYear

1998

fDate

5/1/1998 12:00:00 AM

Firstpage

185

Lastpage

187

Abstract

Membrane-supported coplanar waveguides (CPWs) are needed for low-dispersive and low-loss millimeter- and submillimeter waves as well as for power sensor applications. The authors demonstrate CPWs on polyimid membranes micromachined on gallium arsenide (GaAs) that meet the requirements of a typical microwave monolithic integrated circuit (MMIC) process. The influence of the design parameters is simulated by finite difference in frequency domain (FDFD), in excellent agreement with the experiment. For a membrane CPW with ground to ground spacing of only 50 μm and characteristic impedance of 115 /spl Omega/, relative effective dielectric constants near 1.02 and attenuation of 0.14 dB/mm at 25 GHz have been achieved.

Keywords

III-V semiconductors; MIMIC; MMIC; coplanar waveguides; electric sensing devices; gallium arsenide; membranes; microwave measurement; power measurement; 25 GHz; GaAs; MMIC application; design parameters; finite difference in frequency domain; membrane CPW; membrane-supported coplanar waveguides; micromachined membrane; microwave monolithic integrated circuit process; polyimid membranes; power sensor applications; Biomembranes; Circuit simulation; Coplanar waveguides; Finite difference methods; Frequency domain analysis; Gallium arsenide; Impedance; MMICs; Monolithic integrated circuits; Submillimeter wave integrated circuits;

fLanguage

English

Journal_Title

Microwave and Guided Wave Letters, IEEE

Publisher

ieee

ISSN

1051-8207

Type

jour

DOI

10.1109/75.668704

Filename

668704