Title :
Electrical characteristics of helicon wave plasmas
Author :
Yun, Seok-Min ; Kim, Jung-Hyung ; Chang, Hong-Young
Author_Institution :
Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
fDate :
4/1/1998 12:00:00 AM
Abstract :
The external electrical characteristics of helicon wave plasmas have been studied over a wide range of magnetic fields, radio frequency (RF) power, frequencies, and Ar gas pressures. External parameters, such as antenna voltage, current, and phase shifts, and internal parameters, such as electron density, are measured. The equivalent discharge resistance, reactance, and power transfer efficiency are calculated through these measurements. The characteristics of helicon mode is compared with inductively coupled plasma (ICP) and low mode. The power efficiency of the helicon mode is better than that of other modes. Consequently, electron density of helicon mode is much higher than that of other modes. This means the existence of a mechanism where electrons are very efficiently accelerated by the electric field of the antenna in the helicon mode. The power efficiency of helicon mode is higher at lower RF frequency and at optimum gas pressure than that of other modes
Keywords :
plasma diagnostics; plasma properties; plasma waves; Ar gas pressures; RF frequency; antenna voltage; current; discharge resistance; electric field; electrical characteristics; electron density; helicon wave plasmas; inductively coupled plasma; low mode; magnetic fields; phase shifts; power efficiency; power transfer efficiency; radio frequency power; reactance; Antenna measurements; Electric variables; Electrical resistance measurement; Electrons; Magnetic field measurement; Plasma density; Plasma measurements; Plasma properties; Plasma waves; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on