Design, technology, numerical simulation and optimization of building blocks of a micro and nano scale tensile testing platform with focus on a piezoresistive force sensor

In this paper, building blocks of a MEMS tensile testing platform are presented. The building blocks include a thermo-mechanical MEMS actuator, driven by an aluminum thin-film heater on a thermal oxide for electrical insulation, a capacitative displacement sensor and a piezoresistive force sensor, capable of measuring forces on a nano-newton scale. It is shown, that the presented building blocks fulfill the requirements for the use in a tensile loading stage for thermo-mechanical material characterization of one dimensional material samples on a micro- and nanoscopic scale under different environmental conditions, as varying temperatures, pressure, moisture. All components are realized in BDRIE technology, following a specimen centered approach. In extension to previous presented actuators and sensors, the authors are aiming for high flexibility and full integratability of all components on the wafer-level and require for all building blocks the capability of electrical drive and electrical in situ readout, respectively.