Parallel-beam sensor/actuator unit and its application to the gyroscope

Proposes application of a parallel-beam structure to the gyroscope. The parallel-beam structure has the following significant features: 1) the tip moves in parallel at the end; 2) this structure converts the small displacement into a large concentrated strain; 3) even though some units are piled up, each unit does not interfere with another; and 4) the lateral rigidity is high. We analyzed these basic features by finite-element method analysis. We have proposed the parallel-beam sensor/actuator unit using this structure, and a new gyroscope. We show two methods to improve its performance; these are resonant frequency control and mechanical coupling suppression. It is concluded that the proposed structure is suited to the gyroscope