DocumentCode
138309
Title
A new approach for modeling drain current process variability applied to FDSOI technology
Author
Denis, Y. ; Monsieur, F. ; Petit, D. ; Tavernier, C. ; Jaouen, H. ; Ghibaudo, Gerard
Author_Institution
STMicroelectron., Crolles, France
fYear
2014
fDate
7-9 April 2014
Firstpage
93
Lastpage
96
Abstract
This paper proposes a novel methodology for modeling process related FDSOI MOSFET drain current variability. The novelty of our methodology is to combine statistical analysis tools (RSM, Stepwise Regression (SWR) and DOE) with a simple analytical drain current model. Our approach is finally compared to conventional least square method (LSM) and SWR.
Keywords
MOSFET; design of experiments; regression analysis; silicon-on-insulator; DOE; FDSOI MOSFET; LSM; RSM; SWR; analytical drain current model; design of experiment; drain current process variability modeling; least square method; statistical analysis tools; stepwise regression; Decision support systems; DOE; FDSOI MOSFET; Process compact modeling; RSM; Stepwise Regression; drain current variability; process variability;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultimate Integration on Silicon (ULIS), 2014 15th International Conference on
Conference_Location
Stockholm
Type
conf
DOI
10.1109/ULIS.2014.6813924
Filename
6813924
Link To Document