• DocumentCode
    138309
  • Title

    A new approach for modeling drain current process variability applied to FDSOI technology

  • Author

    Denis, Y. ; Monsieur, F. ; Petit, D. ; Tavernier, C. ; Jaouen, H. ; Ghibaudo, Gerard

  • Author_Institution
    STMicroelectron., Crolles, France
  • fYear
    2014
  • fDate
    7-9 April 2014
  • Firstpage
    93
  • Lastpage
    96
  • Abstract
    This paper proposes a novel methodology for modeling process related FDSOI MOSFET drain current variability. The novelty of our methodology is to combine statistical analysis tools (RSM, Stepwise Regression (SWR) and DOE) with a simple analytical drain current model. Our approach is finally compared to conventional least square method (LSM) and SWR.
  • Keywords
    MOSFET; design of experiments; regression analysis; silicon-on-insulator; DOE; FDSOI MOSFET; LSM; RSM; SWR; analytical drain current model; design of experiment; drain current process variability modeling; least square method; statistical analysis tools; stepwise regression; Decision support systems; DOE; FDSOI MOSFET; Process compact modeling; RSM; Stepwise Regression; drain current variability; process variability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultimate Integration on Silicon (ULIS), 2014 15th International Conference on
  • Conference_Location
    Stockholm
  • Type

    conf

  • DOI
    10.1109/ULIS.2014.6813924
  • Filename
    6813924