Title :
A fully integrated self-calibrating transmitter/receive IC for an ultrasound presence detector microsystem
Author :
Kuratli, Christoph ; Huang, Qiuting
Author_Institution :
Integrated Syst. Lab., Swiss Fed. Inst. of Technol., Zurich, Switzerland
fDate :
6/1/1998 12:00:00 AM
Abstract :
A fully integrated transmitter/receiver ASIC for an ultrasound presence detection microsystem is described. The transducers consist of thermally excited silicon membranes which are fabricated using a standard silicon circuit technology plus one additional etching step. The mixed-signal chip is realized with no external components. It can be configured as either the transmitter or the receiver of the microsystem. As a transmitter, the silicon transducer is used as an electromechanical resonator to emit ultrasound at 80 kHz. In receive mode, the sensor sensitivity is automatically maximized by a self-calibrating scheme which tunes the receiver membrane resonant frequency to that of the transmitter
Keywords :
BiCMOS integrated circuits; calibration; membranes; micromechanical resonators; microsensors; mixed analogue-digital integrated circuits; object detection; sensitivity; silicon; transceivers; ultrasonic applications; ultrasonic transducers; 80 kHz; ASIC; Si; US detector; electromechanical resonator; etching; mixed-signal chip; receiver membrane resonant frequency tuning; self-calibrating transmitter/receive IC; sensor sensitivity; thermally excited Si membranes; transducers; ultrasound presence detector microsystem; Application specific integrated circuits; Biomembranes; Electromechanical sensors; Etching; Integrated circuit technology; Resonant frequency; Silicon; Transmitters; Ultrasonic imaging; Ultrasonic transducers;
Journal_Title :
Solid-State Circuits, IEEE Journal of
