Title :
An integrated liquid mixer/valve
Author :
Voldman, Joel ; Gray, Martha L. ; Schmidt, Martin A.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
We present an integrated liquid mixer/valve to be used for sample preparation for bioscience analysis systems. The mixer/valve is a glass-silicon bonded structure with a wafer-bonded cantilever-plate flapper valve and deep reactive-ion etched ports. It is passively pressure actuated and is distinguished by the fact that it can perform both a mixing and valving function simultaneously to mix two liquids noncontinuously. We present the design and fabrication of the mixer/valve and show that it successfully performs both its valving and mixing functions, including the discontinuous mixing of two liquids. We propose a method for characterizing mixing in this device using fluorescence microscopy and the pH dependence of fluorescein fluorescence. This method aims to allow one to extract the mixing length from a quantifiable observable. We present modeling and results of mixing length measurements using this method.
Keywords :
biological specimen preparation; fluorescence; microfluidics; micromachining; microvalves; mixing; wafer bonding; Si; bioscience analysis systems; deep reactive-ion etched ports; discontinuous mixing; fluorescence microscopy; integrated liquid mixer/valve; mixing length; pH dependence; passively pressure actuated device; sample preparation; wafer-bonded cantilever-plate flapper valve; Biological system modeling; Chaos; Etching; Fabrication; Fluorescence; Laboratories; Liquids; Microscopy; Valves; Wafer bonding;
Journal_Title :
Microelectromechanical Systems, Journal of