Title :
Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering
Author :
Gokce, Sertan Kutal ; Holmstrom, Sven ; Hibert, Cyrille ; Olcer, Selim ; Bowman, David ; Urey, Hakan
Author_Institution :
Dept. of Electr. Eng., Koc Univ., Istanbul, Turkey
Abstract :
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 μm out of plane and 34 μm in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
Keywords :
beam steering; laser applications in medicine; laser arrays; microfabrication; microlenses; 2D actuation; MLA; laser beam steering; polymer microlens array; two-dimensional MEMS stage; Beam steering; comb drive; endoscopic imaging; microelectromechanical systems (MEMS) stage; microlens array (MLA);
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2010.2090507
