A relational database for semiconductor device parametric data

Semiconductor device parametric test data collected by lot, wafer, and die form a hierarchical data structure that lends itself to two relational models reflecting two data views. The two models may be integrated by carefully considering relationships, and the resultant structure is applicable to in-process data collection. Semiconductor device parametric data models are discussed from the two viewpoints, and a practical database based on the set-theoretic relational data model is developed. Application of the developed model to semiconductor in-process and functional test data is also discussed