DocumentCode :
1394283
Title :
"Pac-Man" process eats nanodirt
Author :
Adee, Sally
Volume :
47
Issue :
2
fYear :
2010
fDate :
2/1/2010 12:00:00 AM
Firstpage :
13
Lastpage :
13
Abstract :
Cleaning up nanoparticles is critical to commercializing extreme UV lithography
Keywords :
Conductors; Consumer electronics; Electronics industry; Industrial electronics; Magnetic analysis; Magnetic sensors; Magnetometers; Magnetoresistance; Telephone sets; Voltage;
fLanguage :
English
Journal_Title :
Spectrum, IEEE
Publisher :
ieee
ISSN :
0018-9235
Type :
jour
DOI :
10.1109/MSPEC.2010.5397766
Filename :
5397766
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1394283
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