Title :
Closed-loop micromachined accelerometer based on thermal convection
Author :
Garraud, A. ; Combette, P. ; Deblonde, Antoine ; Loisel, P. ; Giani, Annarita
Author_Institution :
Inst. d´E´lectronique du Sud, Univ. of Montpellier 2, Montpellier, France
fDate :
11/1/2012 12:00:00 AM
Abstract :
A significant improvement of thermal accelerometer bandwidth κ demonstrated. In a classic open-loop configuration, a micromachined thermal accelerometer having a width of 1500 μm has a sensitivity of 0.045°C/g and a bandwidth up to 66 Hz limited by gas thermal response. Anew sensor architecture is proposed to improve bandwidth with no sensitivity decrease: a closed-loop configuration with the addition of two resistors placed close to detectors to rebalance their temperature. They directly act on the thermal response of the fluid. Thus, sensor bandwidth is increased up to 1 kHz with a similar sensitivity of 0.034°C/g.
Keywords :
accelerometers; closed loop systems; convection; micromechanical devices; open loop systems; resistors; classic open-loop configuration; closed-loop configuration; closed-loop micromachined accelerometer; gas thermal response; micromachined thermal accelerometer; resistors; sensor architecture; sensor bandwidth; thermal accelerometer bandwidth; thermal convection; thermal response;
Journal_Title :
Micro & Nano Letters, IET
DOI :
10.1049/mnl.2012.0702
