Title :
Photomodulated reflectance as a valuable nondestructive process tool for VCSELs
Author :
Sale, T.E. ; Hosea, T.J.C. ; Thomas, P.J.S.
Author_Institution :
Sch. of Phys. & Chem., Surrey Univ., Guildford, UK
Abstract :
Optical reflectivity spectra are useful in assessing the structure of vertical-cavity surface-emitting lasers (VCSELs) but show little of the nature of the active quantum well (QW). Here we use photomodulated reflectance to identify a region of an epitaxial wafer with optimal cavity-QW alignment. AlInGaP-AlGaAs visible VCSEL devices fabricated from this region lased well, compared with devices from a nearby control piece of the wafer which failed to lase at all.
Keywords :
III-V semiconductors; aluminium compounds; gallium compounds; indium compounds; modulation spectroscopy; optical testing; quantum well lasers; reflectivity; semiconductor device testing; surface emitting lasers; AlInGaP-AlGaAs; AlInGaP-AlGaAs visible VCSEL devices; VCSELs; active quantum well; epitaxial wafer; optical reflectivity spectra; optimal cavity-QW alignment; photomodulated reflectance; valuable nondestructive process tool; vertical-cavity surface-emitting lasers; Fiber lasers; Marketing and sales; Mirrors; Optical surface waves; Quantum well lasers; Reflectivity; Semiconductor lasers; Stimulated emission; Surface emitting lasers; Vertical cavity surface emitting lasers;
Journal_Title :
Photonics Technology Letters, IEEE
