Title :
Constant energy device test for electrostatic discharge (ESD) of semiconductor devices
Author :
Greason, William D. ; Bulach, Sviatoslav
Author_Institution :
Dept. of Electr. Eng., Univ. of Western Ontario, London, Ont., Canada
Abstract :
An analysis is presented fur the models and test methods used to simulate the electrostatic discharge (ESD) event for a charged semiconductor device. A new constant energy device (CED) test method is proposed to provide control of charge and potential for constant energy discharges and give a better evaluation of device reliability. Experimental results are presented for tests conducted on a basic CMOS structure
Keywords :
MIS devices; electrostatic discharge; semiconductor device models; semiconductor device reliability; semiconductor device testing; CMOS semiconductor devices; ESD event; constant energy device test; constant energy discharges; device reliability; electrostatic discharge; Circuit testing; Electrostatic discharge; Equations; Integrated circuit modeling; Integrated circuit packaging; Pins; Semiconductor device testing; Semiconductor devices; Switches; Switching circuits;
Journal_Title :
Industry Applications, IEEE Transactions on
