Title :
Micromachined devices for wireless communications
Author :
Nguyen, Clark T -C ; Katehi, Linda P B ; Rebeiz, Gabriel M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
fDate :
8/1/1998 12:00:00 AM
Abstract :
An overview of recent progress in the research and development of micromachined devices for use in wireless communication subsystems is presented. Among the specific devices described are tunable micromachined capacitors, integrated high-Q inductors, micromachined low-loss microwave and millimeter-wave filters, low-loss micromechanical switches, microscale vibrating mechanical resonators with Q´s in the tens of thousands, and miniature antennas for millimeter-wave applications. Specific applications are reviewed for each of these components with emphasis on methods for miniaturization and performance enhancement of existing and further wireless transceivers
Keywords :
micromachining; radio equipment; transceivers; integrated high-Q inductors; low-loss micromechanical switches; low-loss microwave filters; low-loss millimeter-wave filters; micromachined devices; microscale vibrating high-Q mechanical resonators; miniature millimeter-wave antennas; transceivers; tunable capacitors; wireless communications; Capacitors; Inductors; Micromechanical devices; Microwave devices; Microwave filters; Millimeter wave communication; Millimeter wave technology; Research and development; Resonator filters; Wireless communication;
Journal_Title :
Proceedings of the IEEE
