Title :
In-situ alumina recession and protrusion measurement on a magnetic head
Author :
Li, Yufeng ; Wang, Geng
Author_Institution :
Samsung Inf. Syst. America, San Jose, CA, USA
fDate :
7/1/1998 12:00:00 AM
Abstract :
A method is proposed in this study to measure the alumina recession and protrusion of a magnetic head. This method is accurate and efficient, eliminates the ambiguity caused by reference plane selection, and can be easily implemented during flying height measurement. It also can be extended to measure the minimum flying height of an air-bearing surface, and more accurately evaluate the flying height standard variation of a HGA manufacturing process
Keywords :
alumina; height measurement; magnetic heads; surface topography measurement; Al2O3; HGA manufacturing process; air bearing surface; alumina protrusion; alumina recession; flying height measurement; in situ measurement; magnetic head; Atom optics; Atomic force microscopy; Atomic measurements; Force measurement; Glass; Magnetic heads; Optical microscopy; Optical sensors; Performance evaluation; Time measurement;
Journal_Title :
Magnetics, IEEE Transactions on
