Title :
Measured attenuation of coplanar waveguide on CMOS grade silicon substrates with polyimide interface layer
Author :
Ponchak, G.E. ; Katehi, L.P.B.
Author_Institution :
NASA Lewis Res. Center, Cleveland, OH, USA
fDate :
6/25/1998 12:00:00 AM
Abstract :
The measured propagation constant of a coplanar waveguide on CMOS grade silicon with a polyimide interface layer is presented. It is shown that the transmission line can have an attenuation comparable to other transmission lines on Si substrates if the proper polyimide thickness is used
Keywords :
MMIC; UHF integrated circuits; coplanar waveguides; polymer films; silicon; substrates; CMOS grade Si substrates; CPW/polyimide layer/Si substrate; Si; Si MMICs; Si RFICs; attenuation; coplanar waveguide; polyimide interface layer; propagation constant; transmission line;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19980840
