Title :
Thermally tunable integrated optical ring resonator with poly-Si thermistor
Author :
Heimala, Paivi ; Katila, Pekka ; Aarnio, Jaakko ; Heinamaki, Arja
Author_Institution :
VTT Electron., Finland
fDate :
10/1/1996 12:00:00 AM
Abstract :
Doped polysilicon is applied as a thermo-optic heating element to temperature tune the ring resonator based on silicon nitride rib waveguides on silicon. The ring diameter is 2 mm allowing a large free spectral range of 26 GHz. For the first time, a poly-Si resistor is used as a thermistor to measure waveguide temperature. The temperature coefficient of the poly-Si thermistor is 9.5×10-4/°C. The reproducibility of the temperature measurement is 0.3°C. The finesse of the ring resonator is 77. The propagation loss of silicon nitride rib waveguide is 0.5 dB/cm at the wavelength of 1.312 μm. The temperature tuning of the ring resonator and the in situ supervision of the temperature on chip based on the same poly-Si fabrication process may find use especially in optical sensor applications
Keywords :
integrated optics; optical losses; optical resonators; optical sensors; optical waveguides; rib waveguides; silicon; silicon compounds; thermistors; thermo-optical effects; tuning; 0.5 dB; 1.312 mum; 2 mm; Si; Si3N4 nitride rib waveguides; Si3N4-Si; doped polysilicon; finesse; large free spectral range; optical sensor applications; poly-Si fabrication process; poly-Si resistor; poly-Si thermistor; propagation loss; ring diameter; temperature coefficient; temperature measurement reproducibility; temperature tuning; thermally tunable integrated optical ring resonator; thermo-optic heating element; waveguide temperature; Heating; Optical ring resonators; Optical waveguides; Resistors; Silicon; Temperature measurement; Temperature sensors; Thermistors; Time measurement; Wavelength measurement;
Journal_Title :
Lightwave Technology, Journal of
