• DocumentCode
    142022
  • Title

    Innovative practices session 2C: Advanced in yield learning

  • Author

    Lin, Yen-Tzu ; Benware, Brady ; Stine, Brian ; Bhavnagarwala, Azeez

  • Author_Institution
    Nvidia
  • fYear
    2014
  • fDate
    13-17 April 2014
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    The onset of FinFET technology nodes brings with it additional challenges in ramping yields due to new defect behaviors and new hardships in the physical failure analysis process. This presentation highlights these challenges and makes the argument that improved scan based diagnosis capabilities that leverage a transistor level understanding of the cells will be necessary to combat these challenges.
  • Keywords
    Abstracts; FinFETs; Graphics; Metrology; Random access memory; Threshold voltage; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Test Symposium (VTS), 2014 IEEE 32nd
  • Conference_Location
    Napa, CA, USA
  • Type

    conf

  • DOI
    10.1109/VTS.2014.6818749
  • Filename
    6818749