Title :
Magnetic, Mechanical, and Optical Characterization of a Magnetic Nanoparticle-Embedded Polymer for Microactuation
Author :
Tsai, Katherine L. ; Ziaei-Moayyed, Maryam ; Candler, Rob N. ; Hu, Wei ; Brand, Vitali ; Klejwa, Nathan ; Wang, Shan X. ; Howe, Roger T.
Author_Institution :
Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA
Abstract :
We have characterized the magnetic, mechanical, and optical properties of SU-8 polymer with embedded nickel nanoparticles (SU8-Ni) of concentrations ranging from 0% to 12.5% Ni by weight. Magnetic characterization was performed using a micropolysilicon torsional actuator as well as via alternating gradient magnetometry. Mechanical properties were measured using nanoindentation, and optical measurements were acquired via spectrophotometry. This magnetic polymer offers several advantages as a micromechanical structural material, including biocompatibility, chemical resistance, thermal stability, low cost, and mechanical compliance for large deflections. It is suitable for fluidics and biomedical applications where remote low-power actuation is desired.
Keywords :
magnetic moments; magnetometers; micromechanical devices; nanoindentation; nanoparticles; nickel; polymers; spectrophotometry; Ni; alternating gradient magnetometry; biocompatibility; biomedical applications; chemical resistance; fluidics; magnetic nanoparticle-embedded polymer; magnetic properties; mechanical properties; microactuation; micromechanical structural material; micropolysilicon torsional actuator; nanoindentation; nickel nanoparticles; optical properties; polymer; spectrophotometry; thermal stability; Biomedical materials; flexible structures; magnetic devices; magnetic materials; microactuators; microelectromechanical devices;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2010.2093560