Fano Resonance Filtering Characteristic of High-Resistivity Silicon Photonic Crystal Slab in Terahertz Region

We investigate experimentally and numerically the Fano resonances of terahertz waves through a high resistivity silicon photonic crystal slab with a hexagonal array of circular air holes. Finite-difference time-domain simulation and terahertz time-domain spectroscopy transmission measurement show good agreement with the data, in support of the Fano resonance mechanism. The frequency dependent transmission spectra show there is a Fano resonance bandpass filtering characteristic at the center frequency of 2.10 THz with a Q factor of 191, which is consistent with that of Fano resonance theory calculation.