Title :
Coupled circuit, field and temperature model of an induction plasma installation
Author :
Ploteau, J.P. ; Fouladgar, J. ; Develey, G.
Author_Institution :
GE44, LRTI, Saint Nazaire, France
fDate :
9/1/1998 12:00:00 AM
Abstract :
A high frequency (HF) induction plasma installation is studied. An analytical model of the generator using optimization is coupled to a voltage driven model of the plasma. The electromagnetic equation of the system is solved by coupling the moment method (MM), the boundary integral method (BIM) and the finite difference method (FDM). The results are used to calculate the temperature distribution inside the plasma using the control volume method (CVM). A hierarchical algorithm is introduced to orchestrate the exchange between the sub-systems. The magnetic field and the temperature inside the plasma are measured by water cooled probes to validate the model
Keywords :
boundary integral equations; finite difference methods; induction heating; magnetic fields; method of moments; optimisation; plasma heating; plasma production; plasma temperature; temperature distribution; thermal analysis; HF induction plasma installation; boundary integral method; control volume method; coupled circuit/field/temperature model; electromagnetic equation; finite difference method; hierarchical algorithm; moment method; optimization; plasma magnetic field; plasma temperature; sub-systems exchange; temperature distribution; voltage-driven model; Analytical models; Coupling circuits; Electromagnetic coupling; Finite difference methods; Frequency; Hafnium; Integral equations; Magnetic field measurement; Plasma measurements; Plasma temperature;
Journal_Title :
Magnetics, IEEE Transactions on
