DocumentCode
1438951
Title
Semiconductor-based electret sensors for sound and pressure
Author
Voorthuyzen, J.A. ; Bergveld, P. ; Sprenkels, A.J.
Author_Institution
Twente Univ., Enschede, Netherlands
Volume
24
Issue
2
fYear
1989
fDate
4/1/1989 12:00:00 AM
Firstpage
267
Lastpage
276
Abstract
The theory and experimental results for integrated electret-based silicon sensors for the detection of sound and pressure are presented. A silicon electret microphone for use in hearing-aids is described. It has an experimentally determined sensitivity of 19 mV/Pa in the frequency range of 50 Hz to 10 kHz. The realization of a pressure sensor for application in catheter-tip blood-pressure measurements is discussed. This type of electret sensor appeared to have a pressure sensitivity of 1.6 μV/Pa in the required frequency range of 0 to 100 Hz
Keywords
electrets; integrated circuit technology; microphones; pressure transducers; 0 to 10 kHz; catheter-tip blood-pressure measurements; electret microphone; experimental results; frequency range; hearing-aids; integrated sensors; pressure sensitivity; pressure sensor; semiconductor-based electret sensors; theory; Acoustic sensors; Air gaps; Capacitive sensors; Electrets; Impedance; Mechanical factors; Mechanical sensors; Micromachining; Microphones; Silicon;
fLanguage
English
Journal_Title
Electrical Insulation, IEEE Transactions on
Publisher
ieee
ISSN
0018-9367
Type
jour
DOI
10.1109/14.90285
Filename
90285
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