DocumentCode :
1446717
Title :
Determination of Dominant-Yield-Loss Mechanism with Volume Diagnosis
Author :
Sharma, Manish ; Schuermyer, Chris ; Benware, Brady
Volume :
27
Issue :
3
fYear :
2010
Firstpage :
54
Lastpage :
61
Abstract :
The cost and cycle time for determining the root cause of yield loss continues to increase as semiconductor technology scales down. A new technique, Axiom, helps yield and product engineers determine the root cause of loss directly from diagnosis results. Consequently, root-cause cycle time is dramatically reduced, resulting in a higher physical-failure analysis success rate and reduced costs.
Keywords :
failure analysis; semiconductor device manufacture; dominant-yield-loss mechanism determination; physical-failure analysis success rate; semiconductor technology; volume diagnosis; Axiom; design and test; diagnosis-driven yield analysis; test failure data; yield loss;
fLanguage :
English
Journal_Title :
Design & Test of Computers, IEEE
Publisher :
ieee
ISSN :
0740-7475
Type :
jour
DOI :
10.1109/MDT.2009.94
Filename :
5255187
Link To Document :
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