Title :
Influence of Surface Recombination on Forward Current–Voltage Characteristics of Mesa GaN
Diodes Formed on GaN Free-Standing Substrates
Author :
Mochizuki, Kazuhiro ; Nomoto, Kazuki ; Hatakeyama, Yoshitomo ; Katayose, Hideo ; Mishima, Tomoyoshi ; Kaneda, Naoki ; Tsuchiya, Tadayoshi ; Terano, Akihisa ; Ishigaki, Takashi ; Tsuchiya, Tomonobu ; Tsuchiya, Ryuta ; Nakamura, Tohru
Author_Institution :
Central Res. Lab., Hitachi Ltd., Tokyo, Japan
fDate :
4/1/2012 12:00:00 AM
Abstract :
The influence of surface recombination on forward current-voltage (IF-VF) characteristics of gallium nitride (GaN) p+n diodes formed on GaN free-standing substrates was both experimentally and computationally investigated. In the temperature range of 373-273 K, the surface-recombination velocity 5 of 0.5-μm n GaN overetched circular-mesa diodes was derived, respectively, as 2-10 × 107 and 1 × 107 cm/s for diodes with and without a mesa-field-plate termination structure consisting of dielectric and metal layers. It was shown that IF (VF <; 2.9 V) is dominated by carrier recombination at the side surface of the etched n GaN. The IF-VF characteristics of the fabricated diodes were compared with the reported GaN p+n diodes with almost-zero overetched depth of n- GaN. The large IF of the latter diodes is attributed to enhanced photon recycling through photon reflection at the metal mirror. Moreover, reducing S to less than 105 cm/s is considered indispensible for achieving similar enhanced photon recycling in overetched terminated diodes.
Keywords :
gallium compounds; p-i-n diodes; surface recombination; wide band gap semiconductors; GaN; carrier recombination; dielectric layers; enhanced photon recycling; fabricated diodes; forward current-voltage characteristics; free-standing substrates; gallium nitride p+n diodes; mesa p+n diodes; mesa-field-plate termination structure; metal layers; metal mirror; overetched circular-mesa diodes; overetched depth; overetched terminated diodes; photon reflection; size 0.5 mum; surface recombination; surface-recombination velocity; temperature 373 K to 273 K; temperature range; Current measurement; Gallium nitride; Photonics; Recycling; Schottky diodes; Surface treatment; Gallium compounds; power semiconductor devices; simulation;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2012.2185241