DocumentCode
1450436
Title
Resonant mechanical magnetic sensor in standard CMOS
Author
Eyre, B. ; Pister, K.S.J. ; Kaiser, W.
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Volume
19
Issue
12
fYear
1998
Firstpage
496
Lastpage
498
Abstract
A novel micromechanical magnetic sensor has been built and tested. The field is detected by measuring the vibration amplitude of a mechanical Lorentz force oscillator. This device is made from a standard 2-μm CMOS fabrication process with a post-processing etch step to undercut and release the sensor. When operated at the resonant frequency of the mechanical system, a sensitivity of 20 μV/G was measured.
Keywords
CMOS integrated circuits; magnetic sensors; microsensors; 2 micron; CMOS fabrication process; etching; magnetic field detection; mechanical Lorentz force oscillator; resonant micromechanical magnetic sensor; vibration; Force measurement; Lorentz covariance; Magnetic field measurement; Magnetic resonance; Magnetic sensors; Mechanical variables measurement; Micromechanical devices; Oscillators; Testing; Vibration measurement;
fLanguage
English
Journal_Title
Electron Device Letters, IEEE
Publisher
ieee
ISSN
0741-3106
Type
jour
DOI
10.1109/55.735758
Filename
735758
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