• DocumentCode
    1456414
  • Title

    International intercomparison of silicon density standards

  • Author

    Bettin, Horst ; Gläser, Michael ; Spieweck, Frank ; Toth, Hans ; Sacconi, Attilio ; Peuto, Anna ; Fujii, Ken-ichi ; Tanaka, Mitsuru ; Nezu, Yoshiaki

  • Author_Institution
    Phys. Tech. Bundesanstalt, Braunschweig, Germany
  • Volume
    46
  • Issue
    2
  • fYear
    1997
  • fDate
    4/1/1997 12:00:00 AM
  • Firstpage
    556
  • Lastpage
    559
  • Abstract
    In order to obtain a more accurate value for the Avogadro constant NA the reliability of density values obtained by different measuring techniques for silicon single crystals was checked by density determinations with four silicon spheres at PTB, IMGC, and NRLM. The diameters of the spheres (two of PTB and two of NRLM) ranged from 90 mm to 94 mm. All the mass measurements (at PTB, IMGC, and NRLM) were carried out in air. At IMGC and NRLM the volume was determined by interferometric measurements, whereas at PTB the volume was obtained from hydrostatic weighings using two Zerodur volume standards. In addition, at PTB the densities of the four spheres were cross-checked by flotation measurements. The maximum relative density difference was found to be 1×10-6, whereas the typical values were 2×10-7
  • Keywords
    constants; density measurement; elemental semiconductors; measurement standards; silicon; 90 to 94 mm; Avogadro constant; IMGC; NRLM; PTB; Si; Si density standards; Zerodur volume standards; absolute density; density values; flotation measurements; hydrostatic weighing; interferometric measurements; international intercomparison; mass measurements; reliability; silicon spheres; Atomic measurements; Crystals; Density measurement; Force measurement; Measurement standards; Performance evaluation; Shape measurement; Silicon; Volume measurement; Wavelength measurement;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.571912
  • Filename
    571912