DocumentCode :
1460189
Title :
ICMTS´96
Volume :
10
Issue :
2
fYear :
1997
fDate :
5/1/1997 12:00:00 AM
Keywords :
CMOS integrated circuits; Contamination; Electron mobility; Flash memory; Integrated circuit testing; MOSFETs; Neural networks; Optical scattering; Pollution measurement; Semiconductor process modeling;
fLanguage :
English
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
Publisher :
ieee
ISSN :
0894-6507
Type :
jour
DOI :
10.1109/TSM.1997.572065
Filename :
572065
Link To Document :
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