Abstract :
This article presents a solid-state semiconductor technology analysis and forecast for 1999. The subjects covered include semiconductor technology roadmap targets, silicon-germanium components, silicon-on-insulator ICs, copper IC interconnects and microelectromechanical systems.
Keywords :
Ge-Si alloys; integrated circuit interconnections; micromechanical devices; semiconductor technology; silicon-on-insulator; technological forecasting; copper IC interconnects; microelectromechanical systems; roadmap targets; silicon-germanium components; silicon-on-insulator ICs; solid-state semiconductor technology; technology analysis; technology forecast; Annealing; Capacitance; Commercialization; Costs; Energy consumption; Semiconductor films; Silicon compounds; Silicon on insulator technology; Solid state circuits; Switches;
